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| 1893 || Technology development || German professo {{w|August Köhler}} achieves an almost perfect image by designing a new method of illumination which uses a perfectly defocused image of the light source to illuminate the sample. The now called {{w|Kohler illumination}} turns an unparalleled illumination system. Using double diaphragms, the system provides triple benefits of a uniformly illuminated specimen, a bright image and minimal glare. <ref name="History of Microscopes"/><ref name="Fundamentals of Forensic Photography: Practical Techniques for Evidence Documentation on Location and in the Laboratory"/> || {{w|Germany}}
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| 1897 || || American physicist {{w|R.W. Wood}} describes the phenomenon of the [[w:Field electron emission |field emission of electrons]], the process of emitting electrons from an extremely small area of a cathodic surface in the presence of a strong eectric field.<ref name="Introduction to Microscopy by Means of Light, Electrons, X Rays, or Acoustics"/> || {{w|United States}}|-| 1900 || Technology development || The theoretic limit of resolution for visible light microscopes (2000 {{w|Å}}) is reached. <ref name="History of Microscopes"/> ||
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| 1903 || Technology development || Austrian-Hungarian chemist {{w|Richard Zsigmondy}} develops the ultra-microscope, which allows the study objects below the wavelenght of light.<ref name="History of Microscopes"/><ref name="assdfg"/> || {{w|Austria}}
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| 1935 || || The first scanning electron microscopes are introduced.<ref name="Biology Run Amok!: The Life Science Lessons of Science Fiction Cinema"/> ||
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| 1936 || || German physicist {{w|Erwin Wilhelm Müller}} applies the principle of field emission of electrons to a negatively charged very fine tip of tungsten wire in the high vacuum of a cathode-ray tube. In this field-electron microscope, Müller obtains a pattern on the fluorescent screen that represents the array of atoms.ref name="Introduction to Microscopy by Means of Light, Electrons, X Rays, or Acoustics"/> ||
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| 1936 || Technology development || German physicist {{w|Erwin Wilhelm Müller}} invents the {{w|field emission microscope}}.<ref name="Nano- and Microscale Drug Delivery Systems: Design and Fabrication">{{cite book |last1=Grumezescu |first1=Alexandru Mihai |title=Nano- and Microscale Drug Delivery Systems: Design and Fabrication |url=https://books.google.com.ar/books?id=WpIxDQAAQBAJ&pg=PA18&dq=1936+Erwin+Wilhelm+M%C3%BCller+invents+the+field+emission+microscope.&hl=en&sa=X&ved=0ahUKEwix1_yzj4rgAhXZIbkGHe8oBq0Q6AEIKTAA#v=onepage&q=1936%20Erwin%20Wilhelm%20M%C3%BCller%20invents%20the%20field%20emission%20microscope.&f=false}}</ref><ref name="History of Microscopes"/><ref name="A Dictionary of Scientists">{{cite book |title=A Dictionary of Scientists |url=https://books.google.com.ar/books?id=AtngooiwXikC&pg=PA389&dq=1936+Erwin+Wilhelm+M%C3%BCller+invents+the+field+emission+microscope.&hl=en&sa=X&ved=0ahUKEwix1_yzj4rgAhXZIbkGHe8oBq0Q6AEIQjAF#v=onepage&q=1936%20Erwin%20Wilhelm%20M%C3%BCller%20invents%20the%20field%20emission%20microscope.&f=false}}</ref><ref name="A Biographical Dictionary of People in Engineering: From the Earliest Records Until 2000">{{cite book |last1=Hall |first1=Carl W. |title=A Biographical Dictionary of People in Engineering: From the Earliest Records Until 2000 |url=https://books.google.com.ar/books?id=l2492-xSSNoC&pg=PA157&dq=1951+Erwin+Wilhelm+M%C3%BCller+invents+the+field+ion+microscope+and+is+the+first+to+see+atoms.&hl=en&sa=X&ved=0ahUKEwjkopzVlYzgAhXmHbkGHZeODXAQ6AEILzAB#v=onepage&q=1951%20Erwin%20Wilhelm%20M%C3%BCller%20invents%20the%20field%20ion%20microscope%20and%20is%20the%20first%20to%20see%20atoms.&f=false}}</ref> || {{w|Germany}}
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| 2010 || Technology development || Researchers at {{w|University of California, Los Angeles}} use a [[w:cryoelectron microscope|Cryogenic electron microscopy]] to see the atoms of a virus.<ref name="History of Microscopes"/> ||
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| 2013 || || The {{w|Arriscope (surgical microscope)}} is presented to the public in a prototype version.<ref>{{cite web
|title=Website of the German Society of Oto-Rhino-Laryngology, Head and Neck Surgery
|url=http://www.hno.org/en/events/
|archive-url=https://web.archive.org/web/20100323055724/http://www.hno.org/en/events/
|dead-url=yes
|archive-date=23 March 2010
|date=14 May 2013
|accessdate=31 January 2019
}}
</ref> || {{w|Germany}}
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| 2014 || Recognition || The {{w|Nobel Prize in Chemistry}} is awarded to {{w|Eric Betzig}}, {{w|Stefan Hell}} and {{w|William Moerner}} “for the development of super-resolved fluorescence microscopy”, allowing microscopes to now ‘see’ matter smaller than 0.2 micrometres.<ref name="History of Microscopes"/> ||
